Nano-Master(美國(guó))

Nanomaster

美國(guó)Nano-Masterwww.nanomaster.com美國(guó)NANOMASTER公司提供高性能反應(yīng)離子刻蝕系統(tǒng)，能夠滿(mǎn)足多種金屬和非金屬刻蝕的需要。該系統(tǒng)可以選用RF、空陰極等離子體、感應(yīng)耦合等離子體（ICP）和微波等離子體源來(lái)滿(mǎn)足不同材料刻蝕的需要。Nano-Master,USAwasfoundedin1992asawholly-ownedsubsidiaryofNano-Master,S .A.,France,aleadingmetrologycompanyindefectinspectionandhighspeedoverlaymeasurement.SubsequenttotheclosingdownofNano-MasterS.A.in1993,Dr.BirolKuyeltookovertheownershipofNano-Master,USA.Later,thenamewaschangedtoNano-Master,Inc.,whichhasnowbecomea100%privatelyownedUScompany.Nano-Master,Inc.manufacturesacompletelineofsputteringsystemswithreactivesputtering,co-sputteringandcombinatorialsputtering,PECVDtools,RIEandDeepRIEsystemsalongwiththermalande-beamevaporators,andsinglewafermegasoniccleaners.Overthepastyears,Nano-Masterhasdevelopedstrategicpartnershipwithleadingtechnologycompaniesthroughouttheworldtodistributeandmarkettheirproductsinthe