VisiTec Microtechnik(德國)
VisiTec Microtechnik
德國VisiTecMicrotechnik www.visitec-em.de德國Visitec捷高公司的超大試樣室Mira型掃描電鏡。•被檢物的尺寸可為直徑700mm,高600mm,長1400mm,重量可達300公斤,真空室長1400,寬1100和高1200mm。•分辨本領(lǐng)4nm,加速電壓0.3kV—20kV。•是一種新的計算機控制、非破壞性的檢查分析測
試裝置,可用于工業(yè)產(chǎn)品的生產(chǎn),質(zhì)量管理,微機加工和工藝品的檢查研究等。VisiTecMicrotechnikGmbHisaninnovativemedium-sizedenterprise.ItsmainpurposeistodevelopandproduceMIRA,theLargeChamberScanningElectronMicroscopes(LC-SEM).Astheworld’slargestoneofitskind,itisusedinvariouscasessinceitwaspresentedin1995.MoreoverVisiTecspecializesinvacuumtechnologyandinnon-destructiveanalysis.Variousdetectorsareavailablefordifferentneeds.InparticulartheFIBandtheFTIRofferaveryaccurateanalysisofsurfaces,eveninmoleculardimensions.Mostly,theLC-SEMisusuallyappliedinResearchandDevelopment.HistoryThecompanywasfoundedbydirectorMartinKleinin1994inGrevesmu