mks 1559A質量流量計（控制器）

產品品牌：

美國mks

產品型號：

1559A

1559A質量流量控制器（大流量，常閉閥）

1559 是一種通用型彈性密封的質量流量控制器，可在20slm（42.5cfh）到200slm（425cfh）量程范圍進行氣體的質量流量控制。相比于其它的 大流量控制器，1559獨有的控制閥門能夠消除振蕩、具有更好的響應時間。它的這個特點是通過使用一“平衡力”閥門的設計來實現的，它能夠消除管道壓力引 起控制閥門內部的非平衡狀態。1559的為全量程的±1％。                                                                                                          例：型號1559A00421LS1BV                                        采購序列號         校準氣體（SEMI氣體編號）*Helium, He                                                         001Argon, Ar                                                           004Hydrogen, H2                                                      007Nitrogen, N2                                                         013Oxygen, O2                                                         015      **校準流量SLM－sccm（相當氮氣200SLM）20                                                                                                             021L                    50                                                                                                             051L                    100                                                                                                           12L               200                                                                                                           22L                       裝配件（Y）標配：Swagelok 0.5英寸管                                                               S                         選配：Swagelok^R8VCR^R凸接頭                                                           R                         選配：Swagelok^R8VCO^R凸接頭                                                           G                          閥常閉                                                            1 電氣/通訊連接器模擬15針D                                                     B 密封（Z）標配:Viton^R                                                                                             V                         選配: Neoprene^R                                                                                       N                         選配: Buna N                                                                                            B                         選配: Kalrez^R                                                                                            K                              型號1559A（續）  用于1559A的電纜線CB259-5-10用來將1559連接至PR4000, 246, 247                                            （如要在247上連接2個以上的通道，需要添加一個電源，請用CB1559-1-10）         CB147-1-10用來將1559連接至146, 186, 647, 167                             CB1559-1-M1用來連接1559A、247D和260PS